LEC # | TOPICS | |
---|---|---|
1 | Overview of Semiconductor Manufacturing (PDF) | |
Statistical Process Control | ||
2 | Statistics Review: Distributions (PDF) | |
3 | Statistics Review: Estimation (PDF) | |
4 | Hypothesis Tests and Control Chart Introduction (PDF) | |
5 | Control Charts | |
6 | Advanced Control Charts, Nested Variance (PDF) | |
Experimental Design | ||
7 | Analysis and Design of Experiments (PDF) | |
8 | ANOVA, Variance Component Estimation | |
9 | MANOVA, Factorial Experiments (PDF) Quiz #1 | |
Yield and Yield Learning | ||
10 | Design of Experiments and Response Surface Modeling (PDF) | |
11 | RSM and Regression (PDF) (PDF) | |
12 | Yield Management and Modeling | |
13 | Yield Modeling | |
Advanced Process Control | ||
14 | Spatial Modeling | |
15 | Sensors and Signals (PDF) | |
16 | PCA and Time Series | |
17 | Run by Run Control (PDF) | |
18 | Real Time Control, Scheduling | |
Factory Operation and Design | ||
19 | Scheduling (PDF) Quiz #2 | |
20 | Planning (PDF) | |
21 | Factory Design and Efficiency (PDF) |