Semiconductor manufacturing course logo. (Image courtesy of MIT.)
Instructor(s)
Prof. Duane Boning
MIT Course Number
6.780
As Taught In
Spring 2003
Level
Graduate
Course Description
Course Features
Course Highlights
This course site features lecture notes and student final papers. Some lectures in this class are also offered though the MIT Singapore Alliance.
Course Description
6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics covered include: design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; and analysis and scheduling of semiconductor manufacturing operations.
Other Versions
Other OCW Versions
OCW has published multiple versions of this subject. 