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Home » Courses » Electrical Engineering and Computer Science » Physics of Microfabrication: Front End Processing » Audio Lectures » 22: Silicides, Device Contacts, Novel Gate Materials

22: Silicides, Device Contacts, Novel Gate Materials

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22: Silicides, Device Contacts, Novel Gate Materials

3: Crystal Growth, Wafer Fabrication, and Basic Properties of Si Wafers (cont.)

3: Crystal Growth, Wafer Fa...

4: Wafer Cleaning and Gettering (cont.)

4: Wafer Cleaning and Gette...

5: Wafer Cleaning and Gettering - Contamination Measurement Techniques

5: Wafer Cleaning and Gette...

6: Oxidation and the Si/SiO2 Interface: Deal/Grove Model, Thin Oxide Models

6: Oxidation and the Si/SiO...

7: Oxidation and the Si/SiO2 Interface: 2D Effects, Doping Effects, Point Defect

7: Oxidation and the Si/SiO...

8: Dopant Diffusion - Need for Abrupt Profiles, Fick's Laws, Simple Analytic

8: Dopant Diffusion - Need ...

9: Dopant Diffusion - Numerical Techniques in Diffusion, E Field Effects

9: Dopant Diffusion - Numer...

10: Dopant Diffusion - Fermi Level Effects, I and V Assisted Diffusion

10: Dopant Diffusion - Ferm...

11: Dopant Diffusion - Revi...

12: Ion Implantation and Annealing - Analytic Models and Monte Carlo

12: Ion Implantation and An...

13: Ion Implantation and Annealing - Physics of E Loss, Damage, Introduction to TED

13: Ion Implantation and An...

14: Transient Enhanced Diffusion (TED) - +1 Model, (311) Defects and TED Introduction

14: Transient Enhanced Diff...

15: Transient Enhanced Diffusion (TED) - Simulation Examples, TED Calculations, RSCE in detail

15: Transient Enhanced Diff...

16: The SUPREM IV Process Simulator

16: The SUPREM IV Process S...

17: Thin Film Deposition and Epitaxy - Introduction to CVD, Si Epitaxial Growth

17: Thin Film Deposition an...

18: Thin Film Deposition and Epitaxy - CVD Examples and PVD

18: Thin Film Deposition an...

19: Thin Film Deposition and Epitaxy - Modeling Topography of Deposition

19: Thin Film Deposition an...

20: Etching - Introduction

20: Etching - Introduction

21: Etching - Poly Gate Etching, Stringers, Modeling of Etching

21: Etching - Poly Gate Etc...

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22: Silicides, Device Contacts, Novel Gate Materials

22: Silicides, Device Conta...

23: Growth and Processing of Strained Si/SiGe and Stress Effects on Devices

23: Growth and Processing o...

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