The calendar below provides information on the course's lecture, lab, and quiz sessions. In addition, the instructor for each session is given according to the following key:
MAS = Martin Schmidt
RCOH = Robert O' Handley
SR = Susan Ruff
LEC # | TOPICS | LABS | KEY DATES |
---|---|---|---|
1 | Overview/Safety/Lab Assignment (MAS) CIM: Introduction to CIM (SR) |
Homework 1 out | |
2 | IC Lab - Overview (MAS) | IC-1: Gate Oxide/Poly | |
3 | Oxidation (MAS) | Homework 1 due Homework 2 out |
|
IC-2: Backside Etch | |||
4 | Diffusion (RCOH) | Homework 2 due Homework 3 out |
|
5 | IC Lab: Testing (MAS) CIM: Writing Technical Reports (SR) |
IC-3: Test | IC lab report out |
6 | Diffusion/Implantation (RCOH) | ||
7 | MEMS Lab: Overview (MAS) | MEMS-1: Photolith | Homework 3 due IC lab report due (in lab) |
8 | Vacuum System (RCOH) | Homework 4 out | |
9 | CVD (RCOH) | ||
10 | Sputtering (RCOH) CIM: Feedback on IC Report, Reports Returned (SR) |
MEMS-2: KOH Etch | Homework 4 due Homework 5 out |
Quiz 1: Through CVD (Staff) | |||
11 | Fluids Lab: Overview (MAS) | Fluids-1: Photolith | |
12 | Evaporation (RCOH) | Revised IC report due | |
13 | MEMS Lab: Testing (MAS) | MEMS-3: Test | Homework 5 due MEMS lab report out |
14 | Lithography (MAS) | Homework 6 out Revised IC report returned |
|
15 | Lithography, Soft Lithography (MAS) | ||
16 | Etching (Wet) (RCOH) | Homework 6 due Homework 7 out |
|
17 | Etching (Dry) (RCOH) | Fluids-2: Molding | MEMS lab report due |
18 | CMOS (MAS) | Homework 7 due Homework 8 out |
|
19 | Advanced Silicon Devices (MAS) | ||
20 | Fluids Lab: Testing (MAS) | Homework 8 due Take home exam out |
|
21 | Take Home Introduction / Patents (MAS) | Fluids-3: Test | Fluids lab report out |
Quiz 2: Through Advanced Silicon Devices (Staff) | |||
22 | Take Home Discussion (MAS) | ||
23 | Advanced Topics (Guest) | Fluids lab report due | |
24 | Advanced Topics (cont.) (Guest) | ||
25 | Analog Devices Fab Tour | Take home quiz due |